MEMS and Microstructures in Aerospace Applications is written from a programmatic requirements perspective. MEMS is an interdisciplinary field requiring knowledge in electronics, micromechanisms, processing, physics, fluidics, packaging, and materials, just to name a few of the skills. As a corollary, space missions require an even broader range of disciplines. It is for this broad group and especially for the system engineer that this book is written. The material is designed for the systems engineer, flight assurance manager, project lead, technologist, program management, subsystem leads and others, including the scientist searching for new instrumentation capabilities, as a practical guide to MEMS in aerospace applications. The objective of this book is to provide the reader with enough background and specific information to envision and support the insertion of MEMS in future flight missions.