In 1985, the author wrote a book titled Plasma Polymerization, Academic Press. This book is an expanded version of that publication, but the title is changed according to the progress made in understanding the phenomena and important developments of interface engineering. Plasma Polymerization has two arguable terms, i.e., ‘‘plasma’’ and ‘‘polymerization.’’ Is the glow discharge used for ‘‘plasma polymerization’’ in the state of ‘‘plasma’’? Are the chemical reactions that occur in glow discharge ‘‘polymerizations’’? The answers to these questions are yes and no depending on the definition and the meaning of these terms. If plasma is not an adequate term to describe low-pressure glow discharge, what term can be used to describe glow discharge? Similarly, if polymerization is not a proper term to describe the material formation that takes place in the glow discharge, what term represents the process better than polymerization? This book explains why luminous chemical vapor deposition (LCVD) is chosen to replace plasma polymerization.