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Silicon Processing for the VLSI Era, Vol. 1: Process Technology
Silicon Processing for the VLSI Era, Vol. 1: Process Technology
Date: 08 June 2011, 02:52

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A thorough, if somewhat dry (makes the wall street journal look like a Sweet Valley High novel) treatment of modern semiconductor fabrication processes. This text is intended as a detailed overview of the processes involved in semiconductor design, particularly MOS technologies. In this regard it works well, through it shouldn't be considered a reference manual for the wafer fabrication engineer. A good summary for people who, like myself, work in the semiconductor industry, but do not deal with the details of fabrication processes on a daily basis.

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