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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
Date: 14 April 2011, 01:59

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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.

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