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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines (Repost)
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines (Repost)
Date: 12 November 2010, 06:08

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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
Publisher: Springer | 2009 | 456 Pages | ISBN: 0387777466 | PDF | 9.60 MB

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.



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