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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Date: 12 June 2011, 02:17
Product Description: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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