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Reliability of MEMS: Testing of Materials and Devices
Reliability of MEMS: Testing of Materials and Devices
Date: 04 May 2011, 07:48

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Review
"The book will undoubtedly be of interest to MEMS practitioners and researchers." (Journal of Applied Electrochemistry, February 2008)
"The book will undoubtedly be of interest to MEMS practitioners and researchers." (Journal of Applied Electrochemistry, February 2008)
Product Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
See all Editorial Reviews
Product Details
* Hardcover: 324 pages
* Publisher: Wiley-VCH (February 15, 2008)
* Language: English
* ISBN-10: 3527314946
* ISBN-13: 978-3527314942

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