Precision Motion Control: Design and Implementation (Advances in Industrial Control)
| Date: 06 May 2011, 20:23
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Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes.
Precision Motion Control (second edition) focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system.
The second edition has been extensively edited and rewritten throughout with the following particular areas being expanded or added:
* piezoelectric actuators;
* fine movement control;
* gantry-stage control;
* interpolation of quadrature encoder signals;
* geometrical error modelling for single-, dual- and general-XY-axis stages.
By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter is provided in a manner that is accessible to a broad base of readers, ranging from academics to practitioners.
Contents
1 Introduction
1.1 Fields Requiring Precision Control
1.1.1 Precision Engineering
1.1.2 Micromanufacturing
1.1.3 Biotechnology
1.1.4 Nanotechnology
1.2 Precision Machines and Tools
1.3 Applications of Precision Motion Control Systems
1.3.1 Semiconductor
1.3.2 Magnetic and Optical Memory Manufacturing
1.3.3 Optical Manufacturing
1.3.4 High-resolution Imaging
1.3.5 Precision Metrology
1.4 Scope of the Book
2 Precision Tracking Motion Control
2.1 Piezoelectric Actuators
2.1.1 Types of Piezoelectric Actuator Configuration
2.1.2 Mathematical Model
2.1.3 Adaptive Control
2.2 Permanent Magnet Linear Motors (PMLM)
2.2.1 Types of PMLM
2.2.2 Mathematical Model
2.2.3 Force Ripples
2.2.4 Friction
2.2.5 Composite Control
2.2.6 Control Enhancement with Accelerometers
2.2.7 Ripple Compensation
2.2.8 Disturbance Observation and Cancellation
2.2.9 Robust Adaptive Control
2.2.10 Iterative Learning Control
3 Automatic Tuning of Control Parameters
3.1 Relay Auto-tuning
3.1.1 Relay with Delay
3.1.2 Two-channel Relay Tuning
3.2 Friction Modelling Using Relay Feedback
3.2.1 Friction Identification Method
3.2.2 Simulation
3.2.3 Initialisation of Adaptive Control
3.3 Optimal Features Extraction from Relay Oscillations
3.4 Experiments
4 Co-ordinated Motion Control of Gantry Systems
4.1 Co-ordinated Control Schemes
4.1.1 Classical Master/Slave Approach
4.1.2 Set-point Co-ordinated Control
4.1.3 Fully Co-ordinated Control
4.2 Simulation Study
4.2.1 Control Task
4.2.2 Results
4.3 Experiments
4.3.1 XY Table-Configuration I
4.3.2 XY Table-Configuration II
4.4 Adaptive Co-ordinated Control Scheme
4.4.1 Dynamic Modelling of Gantry Stage
4.4.2 Model-based Adaptive Control Design
4.4.3 Stability Analysis
4.4.4 Software Simulation
4.4.5 Implementation Results
5 Geometrical Error Compensation
5.1 Overview of the Laser Measurement System
5.2 Components of the Laser Measurement System
5.2.1 Laser Head
5.2.2 Interferometer and Reflector
5.2.3 Measurement Receiver
5.2.4 Measurement and Control Electronics
5.3 Overview of Laser Calibration
5.3.1 Linear Measurement
5.3.2 Angular Measurement
5.3.3 Straightness Measurement
5.3.4 Squareness Measurement
5.4 Roll Measurement Using a Level-sensitive Device
5.5 Accuracy Assessment
5.6 Factors Affecting Measurement Accuracy
5.6.1 Linear Measurement Errors
5.6.2 Angular Measurement Errors
5.6.3 Straightness Measurement Errors
5
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