Nanolithography and Patterning Techniques in Microelectronics - ISBN:1855739313

Nanolithography and Patterning Techniques in Microelectronics

Date: 14 April 2011, 05:06

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Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, use of nanostencils, photolithography, and inkjet printing.

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