Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering | Date: 04 May 2011, 07:58
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Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.
Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.
Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.
Product Description
Nanoengineering and technology will change the very nature of most human-made structures, devices, and systems. Developing the basic theoretical foundations needed to design, develop, analyze, and prototype high-performance micro- and nano-mechanical systems (MEMS and NEMS), this text brings together the various methods, techniques, and technologies needed to solve a wide array of engineering problems. With interdisciplinary synergism, it focuses on basic studies of phenomena and processes in NEMs and MEMs, synthesis of nano-and micro-scale devices and systems, designing components, and much more. The author discusses the application and impact of these structures, devices, and systems to a variety of fields, including information technology, medicine, the environment, power systems, and national security.
Review
Sergey Edward Lyshevski obviously has a lot of experience to draw on for this book... While the book focuses on sensor, motor, and control applications, the author also tries to be comprehensive in all aspects of MEMS operation... Dr. Lyshevski's book is an intriguing and fun tour of NEMS and MEMS.
-IEEE Microwave Magazine, December 2001
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