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Micro Electronic and Mechanical Systems
Micro Electronic and Mechanical Systems
Date: 26 April 2011, 00:08

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This book discusses key aspects and the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field.

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