Handbook of Surface and Nanometrology - ISBN:0750305835

Handbook of Surface and Nanometrology

Date: 13 April 2011, 09:08

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In the past few years there have been some significant changes in metrology brought about by miniaturization on the one hand, and the increasing use of simulations and packages which allow easy visualization but divorce from practice on the other. The effect of miniaturization has been to make the engineer jump down many scales of size from automotive type components to those of mm or even much less. Pushing up from even smaller scales are the physicist anxious to build practical working devices. These roles are almost the exact opposite of the traditional positions. Where these disciplines meet is at the ‘nano’ level taken to be 100 nm down to about 0.1nm. So at the nano level there is an uncomfortable confrontation between two disciplines both in unfamiliar guises: often having different word meanings and certainly different strategies.

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