Fabrication of GaAs Devices - ISBN:0863413536

Fabrication of GaAs Devices

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Fabrication of GaAs Devices
By C. Ashby A. Baca
* Publisher: The Institution of Engineering and Technology
* Number Of Pages: 368
* Publication Date: 2005-09-30
* ISBN-10 / ASIN: 0863413536
* ISBN-13 / EAN: 9780863413537
Description
Scope: This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices.
The authors are with Sandia National Laboratories.
Level
Suitable for both new and practising engineers.
Book contents
Introduction to GaAs Devices. Semiconductor Properties, Growth, Characterisation and Processing Techniques. Cleaning and Passivation of GaAs and Related Alloys. Wet Etching and Photolithography of GaAs and Related Alloys. Dry Etching of GaAs and Related Alloys Ohmic Contacts. Schottky Contacts. Field Effect Transistors. Special Fabrication Issues for Opto-Electronic and MIS GaAs Devices.

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