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Comprehensive Microsystems, Three-Volume Set, Volume 1-3 (Repost)
Comprehensive Microsystems, Three-Volume Set, Volume 1-3 (Repost)
Date: 12 November 2010, 06:10

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Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe, “Comprehensive Microsystems, Three-Volume Set, Volume 1-3”
Elsevier Science | 2007-09-15 | ISBN: 0444521941 | 2100 pages | PDF | 73 MB

Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated microsystems. At over 2000 pages, Comprehensive Microsystems represents the authoritative primary reference source on microsystems.



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