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CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)
CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)
Date: 23 May 2011, 19:39

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Product Description:
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.

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