CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms - ISBN:354022680X

CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms

Date: 15 April 2011, 15:48

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In order to facilitate the inspection of deep sub-micron features in integrated circuits, a new generation of semiconductor inspection systems is being pushed to new limits to image at ever shorter wavelengths - using deep-UV (DUV) sensitive cameras. However, conventional CCD cameras have very poor responsivity in the DUV and their stability upon prolonged DUV exposure is a relevant concern. This book investigates the causes of CCD degradation and the damage mechanisms due to DUV exposure, as well as reporting new results for device performance at these wavelengths.

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