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An Introduction to Microelectromechanical Systems Engineering 2nd edition
An Introduction to Microelectromechanical Systems Engineering 2nd edition
Date: 19 January 2011, 07:58

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This second edition brings readers up-to-date with the latest developement in this cutting-edge areas. Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS

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